Conformity and structure of titanium oxide films grown by atomic layer deposition on silicon substrates

Published 2007 View Full Article

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Title
Conformity and structure of titanium oxide films grown by atomic layer deposition on silicon substrates
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 15, Pages 4855-4862
Publisher
Elsevier BV
Online
2007-09-17
DOI
10.1016/j.tsf.2007.09.008

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