Conformity and structure of titanium oxide films grown by atomic layer deposition on silicon substrates

出版年份 2007 全文链接

标题

Conformity and structure of titanium oxide films grown by atomic layer deposition on silicon substrates

作者

关键词

-

出版物

THIN SOLID FILMS

Volume 516, Issue 15, Pages 4855-4862

出版商

Elsevier BV

发表日期

2007-09-17

DOI

10.1016/j.tsf.2007.09.008

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Protocol

Reagent

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