Wavy microstructures formed at the SiO2/Si interface under the action of high-power ion-beam pulses

Published 2013 View Full Article

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Title
Wavy microstructures formed at the SiO2/Si interface under the action of high-power ion-beam pulses
Authors
Keywords
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Journal
TECHNICAL PHYSICS LETTERS
Volume 39, Issue 2, Pages 147-149
Publisher
Pleiades Publishing Ltd
Online
2013-03-12
DOI
10.1134/s1063785013020090
References
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