Plasma-dynamic and optical characteristics of magnetron-type cylindrical gas discharge under conditions of titanium nitride film synthesis

Title
Plasma-dynamic and optical characteristics of magnetron-type cylindrical gas discharge under conditions of titanium nitride film synthesis
Authors
Keywords
-
Journal
TECHNICAL PHYSICS
Volume 54, Issue 7, Pages 1052-1057
Publisher
Pleiades Publishing Ltd
Online
2009-07-22
DOI
10.1134/s1063784209070214

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