Plasma-dynamic and optical characteristics of magnetron-type cylindrical gas discharge under conditions of titanium nitride film synthesis

出版年份 2009 全文链接

标题

作者

关键词

出版物

Volume 54, Issue 7, Pages 1052-1057

出版商

Pleiades Publishing Ltd

发表日期

2009-07-22

DOI

10.1134/s1063784209070214

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