Angle-resolved XPS depth profiling of modeled structures: testing and improvement of the method

Published 2010 View Full Article

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Title
Angle-resolved XPS depth profiling of modeled structures: testing and improvement of the method
Authors
Keywords
-
Journal
SURFACE AND INTERFACE ANALYSIS
Volume 42, Issue 6-7, Pages 649-652
Publisher
Wiley
Online
2010-04-23
DOI
10.1002/sia.3361

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