Effects of negative bias on the structural, topological and tribological properties of amorphous carbon films prepared by magnetron sputtering
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Title
Effects of negative bias on the structural, topological and tribological properties of amorphous carbon films prepared by magnetron sputtering
Authors
Keywords
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Journal
SURFACE AND INTERFACE ANALYSIS
Volume 43, Issue 9, Pages 1218-1223
Publisher
Wiley
Online
2010-10-20
DOI
10.1002/sia.3702
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