Effects of negative bias on the structural, topological and tribological properties of amorphous carbon films prepared by magnetron sputtering

Title
Effects of negative bias on the structural, topological and tribological properties of amorphous carbon films prepared by magnetron sputtering
Authors
Keywords
-
Journal
SURFACE AND INTERFACE ANALYSIS
Volume 43, Issue 9, Pages 1218-1223
Publisher
Wiley
Online
2010-10-20
DOI
10.1002/sia.3702

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