The isotopic comparative method (ICM) for SIMS quantification of boron in silicon up to 40 at.%

Published 2010 View Full Article

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Title
The isotopic comparative method (ICM) for SIMS quantification of boron in silicon up to 40 at.%
Authors
Keywords
-
Journal
SURFACE AND INTERFACE ANALYSIS
Volume 43, Issue 1-2, Pages 36-40
Publisher
Wiley
Online
2010-07-20
DOI
10.1002/sia.3629
References
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