Effect of duty cycles on the deposition and characteristics of high power impulse magnetron sputtering deposited TiN thin films

Published 2014 View Full Article

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Title
Effect of duty cycles on the deposition and characteristics of high power impulse magnetron sputtering deposited TiN thin films
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 259, Issue -, Pages 232-237
Publisher
Elsevier BV
Online
2014-03-20
DOI
10.1016/j.surfcoat.2014.03.011

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