Study of SiNx films used as protective layer on Ni film flow sensors

Published 2014 View Full Article

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Title
Study of SiNx films used as protective layer on Ni film flow sensors
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 253, Issue -, Pages 38-43
Publisher
Elsevier BV
Online
2014-05-16
DOI
10.1016/j.surfcoat.2014.05.011

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