Properties of amorphous SiAlON thin films grown by RF magnetron co-sputtering

Published 2014 View Full Article

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Title
Properties of amorphous SiAlON thin films grown by RF magnetron co-sputtering
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 258, Issue -, Pages 1191-1195
Publisher
Elsevier BV
Online
2014-07-10
DOI
10.1016/j.surfcoat.2014.07.011

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