Continuum and kinetic simulations of the neutral gas flow in an industrial physical vapor deposition reactor

Published 2013 View Full Article

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Title
Continuum and kinetic simulations of the neutral gas flow in an industrial physical vapor deposition reactor
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 237, Issue -, Pages 176-181
Publisher
Elsevier BV
Online
2013-08-20
DOI
10.1016/j.surfcoat.2013.08.018

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