Thick CrN/AlN superlattice coatings deposited by the hybrid modulated pulsed power and pulsed dc magnetron sputtering

Published 2011 View Full Article

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Title
Thick CrN/AlN superlattice coatings deposited by the hybrid modulated pulsed power and pulsed dc magnetron sputtering
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 228, Issue -, Pages S601-S606
Publisher
Elsevier BV
Online
2011-12-08
DOI
10.1016/j.surfcoat.2011.11.037

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