Influence of bias voltage on microstructure and properties of Al-containing diamond-like carbon films deposited by a hybrid ion beam system

Published 2012 View Full Article

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Title
Influence of bias voltage on microstructure and properties of Al-containing diamond-like carbon films deposited by a hybrid ion beam system
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 229, Issue -, Pages 217-221
Publisher
Elsevier BV
Online
2012-04-05
DOI
10.1016/j.surfcoat.2012.03.076

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