Dual frequency ICP discharges: Effect of pressure and gas ratio on EEPF and discharge parameters

Published 2013 View Full Article

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Title
Dual frequency ICP discharges: Effect of pressure and gas ratio on EEPF and discharge parameters
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 237, Issue -, Pages 440-444
Publisher
Elsevier BV
Online
2013-10-13
DOI
10.1016/j.surfcoat.2013.09.063

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