Influence of Ti–Si cathode grain size on the cathodic arc process and resulting Ti–Si–N coatings

Published 2013 View Full Article

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Title
Influence of Ti–Si cathode grain size on the cathodic arc process and resulting Ti–Si–N coatings
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 235, Issue -, Pages 637-647
Publisher
Elsevier BV
Online
2013-08-31
DOI
10.1016/j.surfcoat.2013.08.042

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