Progress in direct-current plasma immersion ion implantation and recent applications of plasma immersion ion implantation and deposition

Published 2012 View Full Article

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Title
Progress in direct-current plasma immersion ion implantation and recent applications of plasma immersion ion implantation and deposition
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 229, Issue -, Pages 2-11
Publisher
Elsevier BV
Online
2012-04-05
DOI
10.1016/j.surfcoat.2012.03.073

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