Effects of substrate bias voltage on the microstructure, mechanical properties and tribological behavior of reactive sputtered niobium carbide films

Published 2012 View Full Article

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Title
Effects of substrate bias voltage on the microstructure, mechanical properties and tribological behavior of reactive sputtered niobium carbide films
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 212, Issue -, Pages 185-191
Publisher
Elsevier BV
Online
2012-10-04
DOI
10.1016/j.surfcoat.2012.09.046

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