Low resistance ohmic contacts to amorphous IGZO thin films by hydrogen plasma treatment

Title
Low resistance ohmic contacts to amorphous IGZO thin films by hydrogen plasma treatment
Authors
Keywords
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Journal
SURFACE & COATINGS TECHNOLOGY
Volume 206, Issue 24, Pages 5067-5071
Publisher
Elsevier BV
Online
2012-06-14
DOI
10.1016/j.surfcoat.2012.06.017

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