Process–structure–property relations of micron thick Gd2O3 films deposited by reactive electron-beam physical vapor deposition (EB-PVD)

Published 2011 View Full Article

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Title
Process–structure–property relations of micron thick Gd2O3 films deposited by reactive electron-beam physical vapor deposition (EB-PVD)
Authors
Keywords
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Journal
SURFACE & COATINGS TECHNOLOGY
Volume 206, Issue 13, Pages 3094-3103
Publisher
Elsevier BV
Online
2011-12-30
DOI
10.1016/j.surfcoat.2011.12.031

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