A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects

Published 2012 View Full Article

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Title
A rotary reactor for thermal and plasma-enhanced atomic layer deposition on powders and small objects
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 213, Issue -, Pages 183-191
Publisher
Elsevier BV
Online
2012-10-26
DOI
10.1016/j.surfcoat.2012.10.045

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