On surface temperatures during high power pulsed magnetron sputtering using a hot target

Published 2011 View Full Article

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Title
On surface temperatures during high power pulsed magnetron sputtering using a hot target
Authors
Keywords
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Journal
SURFACE & COATINGS TECHNOLOGY
Volume 206, Issue 6, Pages 1155-1159
Publisher
Elsevier BV
Online
2011-08-15
DOI
10.1016/j.surfcoat.2011.08.005

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