Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide

Title
Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 205, Issue 20, Pages 4828-4831
Publisher
Elsevier BV
Online
2011-05-03
DOI
10.1016/j.surfcoat.2011.04.071

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