Influence of nitrogen background pressure on structure of niobium nitride films grown by pulsed laser deposition

Published 2011 View Full Article

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Title
Influence of nitrogen background pressure on structure of niobium nitride films grown by pulsed laser deposition
Authors
Keywords
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Journal
SURFACE & COATINGS TECHNOLOGY
Volume 206, Issue 6, Pages 1168-1174
Publisher
Elsevier BV
Online
2011-08-17
DOI
10.1016/j.surfcoat.2011.08.012

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