Hydrogen quantification of magnetron sputtered hydrogenated amorphous carbon (a-C:H) coatings produced at various bias voltages and their tribological behavior under different humidity levels

Published 2011 View Full Article

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Title
Hydrogen quantification of magnetron sputtered hydrogenated amorphous carbon (a-C:H) coatings produced at various bias voltages and their tribological behavior under different humidity levels
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 206, Issue 7, Pages 1705-1710
Publisher
Elsevier BV
Online
2011-08-18
DOI
10.1016/j.surfcoat.2011.07.089

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