Microstructure and mechanical properties of hard Ti–Si–C–N films deposited by dc magnetron sputtering of multicomponent Ti/C/Si target

Published 2011 View Full Article

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Title
Microstructure and mechanical properties of hard Ti–Si–C–N films deposited by dc magnetron sputtering of multicomponent Ti/C/Si target
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 205, Issue 21-22, Pages 5068-5072
Publisher
Elsevier BV
Online
2011-05-23
DOI
10.1016/j.surfcoat.2011.05.009

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