Mechanical properties of silicon-doped diamond-like carbon films prepared by pulse-plasma chemical vapor deposition

Title
Mechanical properties of silicon-doped diamond-like carbon films prepared by pulse-plasma chemical vapor deposition
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 206, Issue 5, Pages 1011-1015
Publisher
Elsevier BV
Online
2011-04-15
DOI
10.1016/j.surfcoat.2011.03.106

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