Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere

Published 2010 View Full Article

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Title
Time-resolved plasma parameters in the HiPIMS discharge with Ti target in Ar/O2 atmosphere
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 205, Issue -, Pages S317-S321
Publisher
Elsevier BV
Online
2010-11-27
DOI
10.1016/j.surfcoat.2010.11.050

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