Characterization and properties of quaternary Mo–Si–C–N coatings synthesized by magnetron sputtering technique

Title
Characterization and properties of quaternary Mo–Si–C–N coatings synthesized by magnetron sputtering technique
Authors
Keywords
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Journal
SURFACE & COATINGS TECHNOLOGY
Volume 205, Issue 10, Pages 3307-3312
Publisher
Elsevier BV
Online
2010-12-01
DOI
10.1016/j.surfcoat.2010.11.058

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