AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications — A review

Published 2010 View Full Article

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Title
AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications — A review
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 205, Issue 5, Pages 1279-1286
Publisher
Elsevier BV
Online
2010-09-13
DOI
10.1016/j.surfcoat.2010.08.109

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