Structural and mechanical properties of a-C:H and Si doped a-C:H thin films grown by LF-PECVD

Published 2009 View Full Article

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Title
Structural and mechanical properties of a-C:H and Si doped a-C:H thin films grown by LF-PECVD
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 204, Issue 9-10, Pages 1339-1346
Publisher
Elsevier BV
Online
2009-09-19
DOI
10.1016/j.surfcoat.2009.09.016

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