The effect of plasma deposition on the electrical characteristics of Pt/HfOx/TiN RRAM device

Published 2010 View Full Article

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Title
The effect of plasma deposition on the electrical characteristics of Pt/HfOx/TiN RRAM device
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 205, Issue -, Pages S379-S384
Publisher
Elsevier BV
Online
2010-08-19
DOI
10.1016/j.surfcoat.2010.08.043

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