Metallic film deposition using a vacuum arc plasma source with a refractory anode

Title
Metallic film deposition using a vacuum arc plasma source with a refractory anode
Authors
Keywords
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Journal
SURFACE & COATINGS TECHNOLOGY
Volume 204, Issue 6-7, Pages 865-871
Publisher
Elsevier BV
Online
2009-09-10
DOI
10.1016/j.surfcoat.2009.09.003

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