Deposition of BN films on metal substrates from a fluorine-containing plasma

Published 2008 View Full Article

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Title
Deposition of BN films on metal substrates from a fluorine-containing plasma
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 203, Issue 8, Pages 929-933
Publisher
Elsevier BV
Online
2008-06-07
DOI
10.1016/j.surfcoat.2008.06.017

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