Journal
SURFACE & COATINGS TECHNOLOGY
Volume 202, Issue 11, Pages 2302-2305Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2007.09.033
Keywords
PVD hard coating; focused ion milling; SEM; AFM; 3D stylus profilometry
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Hard coatings CrN, TiAlN and multilayer CrN/TiAlN were prepared on different substrates (HSS, D2 tool steels, Al-alloy) by thermoionic arc ion plating and by sputtering. The defects incorporated into the coating were studied by four techniques: top view conventional and field-emission SEM, cross-section SEM, AFM and stylus profilometry. As a specifically useful tool to study internal structure of the defect, we applied focused ion beam milling system, which is built in a conventional scanning electron microscope. By ion beam milling we prepared cross-sections through the defects. (c) 2007 Elsevier B.V All rights reserved.
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