Process stabilization and enhancement of deposition rate during reactive high power pulsed magnetron sputtering of zirconium oxide

Published 2008 View Full Article

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Title
Process stabilization and enhancement of deposition rate during reactive high power pulsed magnetron sputtering of zirconium oxide
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 202, Issue 20, Pages 5033-5035
Publisher
Elsevier BV
Online
2008-05-17
DOI
10.1016/j.surfcoat.2008.05.009

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