Fluorocarbon polymer thin films prepared by three different types of r.f. magnetron sputtering systems

Published 2008 View Full Article

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Title
Fluorocarbon polymer thin films prepared by three different types of r.f. magnetron sputtering systems
Authors
Keywords
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Journal
SURFACE & COATINGS TECHNOLOGY
Volume 203, Issue 1-2, Pages 59-64
Publisher
Elsevier BV
Online
2008-08-16
DOI
10.1016/j.surfcoat.2008.07.035

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