Deposition of titanium dioxide from TTIP by plasma enhanced and remote plasma enhanced chemical vapor deposition

Published 2008 View Full Article

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Title
Deposition of titanium dioxide from TTIP by plasma enhanced and remote plasma enhanced chemical vapor deposition
Authors
Keywords
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Journal
SURFACE & COATINGS TECHNOLOGY
Volume 202, Issue 17, Pages 4076-4085
Publisher
Elsevier BV
Online
2008-03-07
DOI
10.1016/j.surfcoat.2008.02.023

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