Enhancement of physical properties of indium tin oxide deposited by super density arc plasma ion plating by O2 plasma treatment

Title
Enhancement of physical properties of indium tin oxide deposited by super density arc plasma ion plating by O2 plasma treatment
Authors
Keywords
-
Journal
SOLID-STATE ELECTRONICS
Volume 52, Issue 1, Pages 1-6
Publisher
Elsevier BV
Online
2007-08-27
DOI
10.1016/j.sse.2007.07.037

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