Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces

Title
Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces
Authors
Keywords
-
Journal
Smart Materials and Structures
Volume 22, Issue 9, Pages 095010
Publisher
IOP Publishing
Online
2013-08-05
DOI
10.1088/0964-1726/22/9/095010

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