The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film

Published 2011 View Full Article

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Title
The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film
Authors
Keywords
-
Journal
Smart Materials and Structures
Volume 20, Issue 2, Pages 025015
Publisher
IOP Publishing
Online
2011-01-15
DOI
10.1088/0964-1726/20/2/025015

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