The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film

标题
The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film
作者
关键词
-
出版物
Smart Materials and Structures
Volume 20, Issue 2, Pages 025015
出版商
IOP Publishing
发表日期
2011-01-15
DOI
10.1088/0964-1726/20/2/025015

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