Fabrication of a 60-nm-Diameter Perfectly Round Metal-Dot Array over a Large Area on a Plastic Substrate Using Nanoimprint Lithography and Self-Perfection by Liquefaction
Fabrication of a 60-nm-Diameter Perfectly Round Metal-Dot Array over a Large Area on a Plastic Substrate Using Nanoimprint Lithography and Self-Perfection by Liquefaction
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