Reactive Ion Etching of Gold-Nanoparticle-Modified Pyrolyzed Photoresist Films

Published 2009 View Full Article

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Title
Reactive Ion Etching of Gold-Nanoparticle-Modified Pyrolyzed Photoresist Films
Authors
Keywords
-
Journal
Small
Volume 5, Issue 22, Pages 2510-2513
Publisher
Wiley
Online
2009-08-28
DOI
10.1002/smll.200901007

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