Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped Microbeams

Published 2014 View Full Article

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Title
Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped Microbeams
Authors
Keywords
-
Journal
SHOCK AND VIBRATION
Volume 2014, Issue -, Pages 1-7
Publisher
Hindawi Limited
Online
2014-03-30
DOI
10.1155/2014/807489
References
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