Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped Microbeams

标题
Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped Microbeams
作者
关键词
-
出版物
SHOCK AND VIBRATION
Volume 2014, Issue -, Pages 1-7
出版商
Hindawi Limited
发表日期
2014-03-30
DOI
10.1155/2014/807489

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