Room-temperature CO2 sensing using metal–insulator–semiconductor capacitors comprising atomic-layer-deposited La2O3 thin films

Published 2011 View Full Article

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Title
Room-temperature CO2 sensing using metal–insulator–semiconductor capacitors comprising atomic-layer-deposited La2O3 thin films
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 156, Issue 1, Pages 276-282
Publisher
Elsevier BV
Online
2011-04-23
DOI
10.1016/j.snb.2011.04.033

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