期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 156, 期 1, 页码 276-282出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2011.04.033
关键词
CO2 sensing; Atomic layer deposition; La2O3 thin films
Room temperature detection of CO2 using metal-insulator-silicon (MIS) devices is reported. These devices comprise atomic layer deposited La2O3 thin films as the gas-sensitive dielectric layer and Pt, Pt/Ta and Al as the electrodes. Physical mechanisms that lead to the detection of CO2 at room temperature are discussed. (C) 2011 Elsevier B.V. All rights reserved.
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