Electrostatic energy harvesting device with out-of-the-plane gap closing scheme

Published 2014 View Full Article

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Title
Electrostatic energy harvesting device with out-of-the-plane gap closing scheme
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 211, Issue -, Pages 131-137
Publisher
Elsevier BV
Online
2014-03-03
DOI
10.1016/j.sna.2014.02.027

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