Electrostatic energy harvesting device with out-of-the-plane gap closing scheme

标题
Electrostatic energy harvesting device with out-of-the-plane gap closing scheme
作者
关键词
-
出版物
SENSORS AND ACTUATORS A-PHYSICAL
Volume 211, Issue -, Pages 131-137
出版商
Elsevier BV
发表日期
2014-03-03
DOI
10.1016/j.sna.2014.02.027

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